JPS58157037A - イオン発生装置 - Google Patents

イオン発生装置

Info

Publication number
JPS58157037A
JPS58157037A JP57038157A JP3815782A JPS58157037A JP S58157037 A JPS58157037 A JP S58157037A JP 57038157 A JP57038157 A JP 57038157A JP 3815782 A JP3815782 A JP 3815782A JP S58157037 A JPS58157037 A JP S58157037A
Authority
JP
Japan
Prior art keywords
anode
cathode
anodes
potential
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57038157A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0159694B2 (en]
Inventor
Katsuhiro Kageyama
影山　賀都鴻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP57038157A priority Critical patent/JPS58157037A/ja
Publication of JPS58157037A publication Critical patent/JPS58157037A/ja
Publication of JPH0159694B2 publication Critical patent/JPH0159694B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57038157A 1982-03-12 1982-03-12 イオン発生装置 Granted JPS58157037A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57038157A JPS58157037A (ja) 1982-03-12 1982-03-12 イオン発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57038157A JPS58157037A (ja) 1982-03-12 1982-03-12 イオン発生装置

Publications (2)

Publication Number Publication Date
JPS58157037A true JPS58157037A (ja) 1983-09-19
JPH0159694B2 JPH0159694B2 (en]) 1989-12-19

Family

ID=12517569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57038157A Granted JPS58157037A (ja) 1982-03-12 1982-03-12 イオン発生装置

Country Status (1)

Country Link
JP (1) JPS58157037A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103532020A (zh) * 2013-10-15 2014-01-22 南京华科皓纳电气科技有限责任公司 一种负氧离子发生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103532020A (zh) * 2013-10-15 2014-01-22 南京华科皓纳电气科技有限责任公司 一种负氧离子发生装置

Also Published As

Publication number Publication date
JPH0159694B2 (en]) 1989-12-19

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